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Category:Microtechnology

Microtechnology is a set of processes, techniques and tools used to create structures having at least one dimension of a functional feature in order of micrometer (one millionth of a metre, or 10-6 metre, or 1μm), typically within the range of 10-4 to 10-7 meters and application of those structures in more complex systems.

Main article: Microtechnology
v • d • eMicrotechnologyMEMS · MST · MicromachineryBasic structures Interdigital transducer · Cantilever · MicrochannelApplications SensorsMicrobolometerActuatorsComb drive · Scratch Drive Actuator · Thermal actuatorSwitchesDigital micromirror device · Optical switchOther IBM Millipede · RF-MEMS · MOEMS · Bio-MEMS · Microfluidics · Micropower
Processes General Surface micromachining · Bulk micromachining · HAR micromachining · Deposition · Lithography · Etching · BondingSpecific LOCOS · STI · LIGA · HexSil · SIMPLE · SCREAM · Lift-off · SOI · Smart Cut
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Subcategories

This category has the following 6 subcategories, out of 6 total.

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Pages in category "Microtechnology"

The following 65 pages are in this category, out of 65 total. Updates to this list can occasionally be delayed for a few days.

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Categories: Technology | Technology by type | Materials science

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